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Nikon Eclipse L200N and L300N

Nikon_Eclipse_L200N
Overview
Combined with Nikon’s superior CFI60 LU/L optical system and an extraordinary new illumination system, this microscope provides images with greater contrast, high resolving power and darkfield images three times brighter than before. Used independently, or in combination with wafer loaders, the L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticles and other substrates.
 
Key Features:
– Contamination Safeguards
– High Intensity Halogen Illumination
– Improved DIC microscopy
– SEMI S2-0200, S8-0600 Compliant Design
– Tilting Eyepiece Tube
– Fixed-Position X-Y Fine-Movement Controls
– Motorized Nosepiece with Software Control
– CFI60 Optical System
– Vibration Isolation
 
Specifications
 
Main Body: Built-in Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control
Focusing Mechanism: Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments)
Episcopic Illuminator: 12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; polarizer; analyzer
Nosepiece: Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided
Eyepiece Tube: L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100)
Stage: 8 x 8 Stage; stroke: 205 x 205mm; coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls
Eyepieces: CFI eyepiece lens series
Objectives: CFI60 LU/L Plan series
Weight: 43.75 kg (96.45 lbs) when 8 x 8 stage and L2TT eyepiece tube are used
Compliance: SEMI S2-93A, S8-95, CE, UL
 
L200A
Observation Method: Brightfield, Darkfield, DIC, Simple Polarizing
Main Body: Episcopic Stand with attached Universal Nosepiece – Power Supply built-in
Focusing Mechanism: Stroke: 29mm; Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided); Fine 0.1mm per rotation (in 1µm increments); Guide: 4-guide (two roller-race, torque adjustable)
Episcopic Illuminator: Motorized aperture diaphragm (centerable, pinhole slider incorporated); fixed field diaphragm (with focus target); four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Polarizer; Analyzer
Light Source: 100W Halogen – 100W Mercury – 75W Xenon – 150W Metal Halide
Eyepiece Tube: UW Tilting Trinocular Eyepiece Tube (tilt angle 0-30°, erect images); F.O.V.: 25mm; Optical Path Changeover: 2-way (Binocular: Photo 100:0/0:100)
Nosepiece: Fixed-Motorized Sextuple Universal Nosepiece (centerable), highly durable
Stage: 8 x 8 Stage; Cross Travel: 205 x 205mm, Coarse/line-movement changeover: manual; wafer holders: 5-8 inch, Mask Holders 5-6 inch
Control: Front Panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, light intensity control knob; Remote Control: LCD panel, magnification changeover, motorized z-axis, episcopic aperture diaphragm stop buttons, light intensity control knob, motorized bright/darkfield changeover key, DIC adjustment knob, option keys
Eyepieces: CFI Eyepiece Lens Series
Objectives: CFI LU/L Plan Series
Auto Focus Unit: Optional (LED)
Communication: RS-232C
Weight: Approximately 45 kg (when 8 x 8 Stage and UW Eyepiece Tube are used)
Compliance: SEMI S2-0200, S8-0600, CE, UL
 
L200D
Main Body: Built-in Diascopic and Episcopic Illumination; built-in power sources for motorized control; motorized control for nosepiece; light intensity control; aperture diaphragm control; episcopic/diascopic changeover
Focusing Mechanism: Cross travel: 29mm; Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism provided); Fine: 0.1mm per rotation (in 1µm increments)
Episcopic Illuminator: 12V/100W halogen lamp light source built-in; motorized aperture diaphragm (centerable); fixed field diaphragm (with focus target); pinhole slider (optional) can be mounted; four 25mm filters (NCB11/ND4/ND16 and GIF) can be mounted; polarizer; analyzer
Diascopic Illuminator: 12V/100W halogen lamp light source built-in; aperture diaphragm and LWD condenser built-in
Nosepiece: Fixed-motorized Sextuple Universal Nosepiece; slot for DIC attachment provided
Eyepiece Tube: L2TT ultrawide tilting trinocular eyepiece tube (tilt angle 0-30°, erect image); F.O.V.: 25mm; optical path changeover: 2-way (binocular:photo 100:0/0:100)
Stage: 8 x 8 Stage; stroke: 205 x 205mm (diascopic observation range: 150 x 150mm); coarse/fine movement changeover possible; fixed-position X-Y fine-movement controls
Eyepieces: CFI eyepiece lens series
Objectives: CFI60 LU/L Plan series
Weight: 44.45 kg (97.99 lb) when 8 x 8 stage and L2TT eyepiece tube are used
Compliance: SEMI S2-93A, S8-95, CE, UL
 
 
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