Overview
AWL068 wafer loaders have both stability and safety and can transfer wafers safely and reliably between wafer cassette, wafer macro station, wafer flip station and microscope. The system automatically detect wafer size (6″ or 8″ by the carrier coding system. Its ergonomic designs also means that operator can comfortably use the system for long period of time.
 
Application:
– Wafer Front Side Inspection
– Wafer Back Side Inspection
– Wafer Edge Inspection
– Wafer Macro and Micro Inspection
 

360° Macroscopic Inspection
The AWL068 has a macro inspection arm, which can realize 360° rotation of wafer surface for macro inspection and wafer back surface macro inspection. Making it easier to detect surface defects such as scratch mark, defocus scan field, contamination etc. The wafer can be tilted to observe at will through the operating joy stick. The maximum tilt angle of wafer surface is 70°, the maximum tilt angle of wafer back surface is 90° to 160°. By using the rotation function and tilt angle, all defects from front side, back side and edge of the complete wafer can be easily detected.

Ergonomic Design
LCD display can provide the operator with a more intuitive visual experience, can clearly display the current inspection items and the order, and the debugging parameters are clear at a glance. Manual rapid release of the vacuum stage can improve the operator’s comfort and work efficiency.

Application Cases