FAB combines an established, clean and safe robot system, with an innovative vehicle (AGV). It is designed to fully automatically load and unload process tools and to enable fast transportation between process tools and the FAB transport system or stockers/ shelves in the cleanroom. Based on the proven rail solution of the HAP-HERO®
product family (>100 units installed), the carrier handler HAP-HERO®
FAB offers the opportunity to drive freely, without any rail or cable connection, in the cleanroom. An intelligent navigation system combined with an innovative energy management provides ideal conditions for the automation of systems, complete bays or the entire factory.
combines a new robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the clean room. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot.