Overview
With the automatic transfer of 300mm and 200mm wafer. The AWL812 system is equipped with a safe and reliable EFEM system. Load port, aligner, robot, microscope stage are all designed for 12″ and 8″ wafer handling. The system also comes with user friendly graphic user interface. This system is away to perform wafer macro, micro inspection, wafer front side inspection, wafer back side inspection, wafer edge inspection and wafer review using KLARF or any user define EMAP.
 
Application:
– Wafer Front Side Inspection
– Wafer Back Side Inspection
– Wafer Edge Inspection
– Wafer Macro and Micro Inspection
– Wafer Review with KLARF
– Wafer Review with other EMAP

Load Port and FOUP
The device uses the advanced Load port to open & close a FOUP automatically detecting different kind of Load Port, cassettes, FOUP and FOSB. RFID can be easily fitted for connection with E84-E23 and SECS/GEM interface.

Full-field Macro Inspection System
The multi-functional Macro Inspection system provides you with flexible Macro Inspection of Front and Back Side of wafer. Wafer is easily controlled by a joystick conveniently positioning wafer at various angles and in full field of view of the wafer. Auto Macro imaging capturing and reording is also available.

High-speed Pre-focus System and Precision Micro Inspection Stage
The high-speed pre-focus system solves the trouble of focusing of the warped wafer, and the micro-image is immediately clear. Using high-resolution servo with precision slide module, which provides precise positioning for your micro-inspection and meet the accuracy requirements of wafer KLARF map or other EMAPs.

Advanced Optical Microscope System
With advanced optical metallurgical microscope system. Supporting the ultra-wide field of 25mm view observation. The optical system can also be equipped with polarising kits, DIC, and a motorized nosepiece.

Images of Bright Field and Dark Field