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    Nikon NEXIV VMZ-S3020

    Nikon_VMZ-S3020
    Overview
    Nikon’s excellent optics give high accuracy and repeatability across the field of view, increasing speed of measurement. VMZ-S3020 offers a 300 x 200 x 200 (X x Y x Z)mm stroke suitable for measurement of small semiconductor, electronic and mechanical components.
     
    Key Benefits:
    – High accuracy within the field of view (FOV)
    – Improvement of throughput
    – New Design
    – Measurement programming support
    – 8-segment ring illumination with three incident angles
    – High measuring accuracy
     
    Benefits & features
     
    High accuracy within the field of view (FOV)
    Accuracy within FOV (PF2D,PFV2D) is specified. Nikon designed optics deliver high-quality images and realize accurate measurement data. (Proving error* PF2D0.8µm).
    – Type2 zooming head. Determined by Nikon’s in-house measurement method. Measurement of the perimeter of a circular reference device. This involves stage movement so a video caliper tool within the FOV, is evenly placed at 25 points on the perimeter.
    – Probing error of the imaging probe* PFV2D 0.3 µm
    – *Type2 zooming head. Determined by Nikon’s in-house measurement method. Measurement of 25 points that are evenly placed on the perimeter of a circular reference device at one location on the screen (without stage movement).
     
    Improvement of throughput
    Throughput has improved by realizing faster short-distance stage movements. This contributes to the shortening of the measurement time.
    Nikon_VMZ_S3020_through_put
     
    New Design
    Along with the exterior design change, the joystick used for stage and optical head movements has been redesigned to make machine operation easier and less tiring during long periods of use.
    Nikon_VMZ_S3020_new_design
     
    Nikon_VMZ_S3020_programming
    Measurement programming support
    Dimension software NEXIV AutoMeasure realizes high precision / high speed / easy measurement with many valuable functions. An important new function supports the measurement program creation processes. By selecting the measurement point, several settings are handled by the system and measurement program code is created automatically.*
    *This function is for workpieces with simple shape structure.
    Guide of conditions: With diascopic illumination. Components with perforations or voids with clearly detected edge contours, without significant variations, or material contamination. (circle, rectangle, and circular arc)
     
    8-segment ring illumination with three incident angles
    Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.
    nikon-metrology-vision-systems-8-segment-ring-illumination-NEXIV-VMZ-R3020
     
    Specifications
     
    Stroke (X Y Z): 300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm
    Minimum readout: 0.01 µm
    Maximum workpiece weight: 20 kg (44.1 lb.)
    Measuring uncertainty: EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
    Z measurement uncertainty: EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
    Camera: Black and White / Color 1/3 CMOS Camera
    XYZ strokes: 300×200×200 mm *Type TZ with low magnification lens: 250×200×200 mm
    Laser AF repeatability range 1),3): 2σ ≦ 0.5 µm
    Auto focus: Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option.
    Illumination: Type 1, 2, 3, and 4 : Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle Type TZ: Left objective lens: Episcopic, darkfield ; Right objective lens: Episcopic, diascopic, darkfield Type A: Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED
    Power source: AC 100-240V 50/60Hz
    Power consumption: 5A-2.5A
    Dimensions & weight (W x D x H): Main body with table (W×D×H): 700×730×1793 mm / approx. 265 kg Controller: 190×450×450 mm / approx. 12 kg
    Footprint: 2700 x 2400 mm

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