Overview
Magnification, AF and illumination conditions can be finely adjusted for each specimen.
VMZ-R6555 offers 650 x 550 mm stroke, which is suitable for large components and “step-and-repeat” measurements of multiple pieces on the stage.
 
Key Benefits:
– Six types of optical zooming head
– Detection of 0.1 mm transparent layer
– 8-segment ring illumination with three incident angles
– High measuring accuracy
– Faster throughput
– 15x high-speed zoom

Benefits & features

Standard magnification zooming heads: type 1 – 3
Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.

High magnification zooming heads: type 4, TZ
Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.

Wide field-of-view zooming head: type A
Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.

Specifications
 
Stroke (X Y Z): 650 x 550 x 200 mm (25.6 x 21.7 x 7.8 in.) 600 x 550 x 200 mm (23.6 x 21.7 x 7.8 in.) (with type TZ, at low magnification)
Minimum readout: 0.01 µm
Maximum workpiece weight: 50 kg (44.1 lb.)
Measuring uncertainty: EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement uncertainty: EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
Camera: Black & white 1/3” CCD, Color 1/3” CCD (option)* *For type 1, 2 and A only
Working distance: Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination), Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens, Type A: 73.5mm (63 mm with laser AF)
Magnification vs. field of view: Type 1: 0.5 – 7.5x / 9.33 x 7 – 0.622 x 0.467 mm Type 2: 1 – 15x / 4.67 x 3.5 – 0.311 x 0.233 mm Type 3: 2 – 30x / 2.33 x 1.75 – 0.155 x 0.117 mm, Type 4: 4 – 60x / 1.165 x 0.875 – 0.07 x 0.068 mm, Type TZ: 1 – 120x / 4.67 x 3.5 – 0.039 x 0.029 mm. Type A: 0.35 – 3.5x / 13.3 x 10 – 1.33 x 1 mm
Auto focus: Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF Type A comes with vision AF as standard and with laser AF as an option
Illumination: Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring), Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators, Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power source: AC 100-240V 50/60Hz
Power consumption: 5A-2.5A
Dimensions & weight (W x D x H): Main unit & table: 1200 x 1640 x 1820 mm / 665 kg (47.2 x 52.8 x 64.6 in. / 1466 lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint: 2400 x 2000 mm